To provide a method capable of irradiating stably at a target beam current value by combining a wire type beam adjuster and a transmission type beam current ammeter, and by controlling it by a comparison circuit of a computer or the like even in the case the beam current cannot be measured directly.
This is the method in which a signal of the beam current value of an irradiation target, or a transmission type beam current ammeter installed in front of the target, is inputted into the computer or the like, comparison with the set beam current value is carried out, the wire type beam adjuster is turned in an increase-decrease direction by the signal, and the beam current value at the irradiation target is always made to be constant at a set value.
COPYRIGHT: (C)2005,JPO&NCIPI
Atsushi Chiba
Tajima Kun
| JP6036721A | ||||
| JP2000353491A | ||||
| JP3208244A | ||||
| JP2000223437A | ||||
| JP53127857U | ||||
| JP11142600A |
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shurin Sakurai
Fujihiro Kanda
Hideo Tanaka
Shinya Hosokawa
Norihiro Fukasawa
Koji Hirayama