To enable size reduction and reduce the cost of an ion detector which is equipped with a Faraday cup and a secondary electron multiplier.
The ion detector 10 is provided with a case 11 with an opening 12 where ion beams pass through; a Faraday cup 20 located on a flying direction extension line of ion beams passing through the opening 12; and a secondary electron multiplier 30, having an incident part 32 of the ion beams, in a direction of moving away from the flying direction extension line. The Faraday cup 20 includes a bottom plate part 21 located on the flying direction extension line, side plate parts 22a, 22b fitted around the bottom plate part 21, and a partitioning plate 23 for partitioning an inner part surrounded by the side plate parts 22a, 22b into a plurality of spaces. The heights of the side plate parts 22a, 22b are increased continuously or gradually, from a closer side of the incident part 32 toward a farther side, and the height of the partitioning plate 23 is formed lower than that of the side plate part 22b, away from the incident part 32 and higher than that of the side plate part 22a, closer to the incident part 32.
TANAKA RYOTA
KUROKAWA YUJIRO
NAKAJIMA TOYOAKI
| JPS61237358A | 1986-10-22 | |||
| JPH1196962A | 1999-04-09 | |||
| JP2006221876A | 2006-08-24 | |||
| JPH10144254A | 1998-05-29 | |||
| JPH0517910U | 1993-03-05 | |||
| JP2009289600A | 2009-12-10 | |||
| JP2006134664A | 2006-05-25 |
| US20040041092A1 | 2004-03-04 |
Shingo Suzuki
Next Patent: ION BEAM PROCESSING DEVICE AND SAMPLE PROCESSING METHOD