Title:
イオン検出器
Document Type and Number:
Japanese Patent JP6987885
Kind Code:
B2
Abstract:
An ion detector for secondary ion mass spectrometer, the detector having an electron emission plate coupled to a first electrical potential and configured to emit electrons upon incidence on ions; a scintillator coupled to a second electrical potential, different from the first electrical potential, the scintillator having a front side facing the electron emission plate and a backside, the scintillator configured to emit photons from the backside upon incidence of electrons on the front side; a lightguide coupled to the backside of the scintillator and confining flow of photons emitted from the backside of the scintillator; and a solid-state photomultiplier coupled to the light guide and having an output configured to output electrical signal corresponding to incidence of photons from the lightguide. A SIMS system includes a plurality of such detectors movable arranged over the focal plane of a mass analyzer.
Inventors:
Bevis Christopher F.
Liu Yangman Alan
Reed david allen
Chefets Eli
Weingarten Amit
Kadishevich Alexander
Liu Yangman Alan
Reed david allen
Chefets Eli
Weingarten Amit
Kadishevich Alexander
Application Number:
JP2019562588A
Publication Date:
January 05, 2022
Filing Date:
May 12, 2017
Export Citation:
Assignee:
Nova Measuring Instruments Incorporated
International Classes:
H01J43/30; G01N23/2258; G01N27/62; H01J37/244; H01J49/30
Domestic Patent References:
| JP2009080124A | ||||
| JP2012230902A | ||||
| JP2013508905A | ||||
| JP2016024941A | ||||
| JP61248345A | ||||
| JP8201342A | ||||
| JP2005207955A |
Foreign References:
| US20040149900 |
Attorney, Agent or Firm:
Tokyo uit international patent corporation
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