Title:
イオンフィルター及びイオンフィルターの製造方法
Document Type and Number:
Japanese Patent JP6481049
Kind Code:
B2
Abstract:
An ion filter (1) used for a gas detector (100) is provided. The ion filter (1) has an insulating substrate (11), a first conductive layer pattern (12) formed on one main surface of the insulating substrate (11), a second conductive layer pattern (13) formed on the other main surface of the insulating substrate (11), and a plurality of through-holes (30) formed along the thickness direction of the insulating substrate (11). The one main surface of the insulating substrate (11) is disposed on the upstream side in the movement direction of electrons in the gas detector (100). The other main surface of the insulating substrate (11) is disposed on the downstream side in the movement direction of electrons in the gas detector. The first conductive layer pattern (12) has a line width (W12) thicker than the line width (W13) of the second conductive layer pattern (13).
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| JPH01309246 | BORON-TRIFLUORIDE PROPORTIONAL COUNTER TUBE |
Inventors:
Daisuke Arai
Application Number:
JP2017554208A
Publication Date:
March 13, 2019
Filing Date:
December 02, 2016
Export Citation:
Assignee:
Fujikura Ltd.
International Classes:
H01J47/06; H01J9/02
Domestic Patent References:
| JP1502944A | ||||
| JP2001508935A | ||||
| JP2011517050A | ||||
| JP6027584B2 |
Foreign References:
| WO2006115249A1 | ||||
| US20020149305 | ||||
| US20080283725 |
Other References:
EVERAERTS, Pieter,Rate capability and ion feedback in GEM-detectors,Academiejaar 2005-2006,FACULTEIT INGENIERSWETENSCHAPPEN, UNIVERSITEIT GENT,pp.52-75
Attorney, Agent or Firm:
Eternal patent business corporation