ION GENERATOR - NAGOYA INST TECHNOLOGY

Title:

ION GENERATOR

Document Type and Number:

Japanese Patent JP2016225279

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide an ion generator including an ion source, an ion generating electrode to which a high voltage is applied, and a pullout electrode, and which injects ions into an object to be implanted.SOLUTION: The ion generator 1 comprises an ion source 34, an ion generating electrode 10 having a sharpened portion 14 at one end, and a pullout electrode 20. The ion generator releases ions from the sharpened portion 14 when a high voltage is applied by the DC high voltage power supply 24. When the ion generating electrode 10 is heated to and above the glass transition temperature and below the melting temperature of the material constituting the ion generating electrode 10, the gas molecules of the ion source 34 are ionized and conducted.SELECTED DRAWING: Figure 1

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Inventors:

TAIKO YUSUKE
MIZUTANI TAKASHI

Application Number:

JP2016056970A

Publication Date:

December 28, 2016

Filing Date:

March 22, 2016

Export Citation:

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Assignee:

NAGOYA INST TECHNOLOGY

International Classes:

H01J27/26; H01T19/04

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