Title:
イオン銃の制御装置、および、イオン銃の制御方法
Document Type and Number:
Japanese Patent JP7126916
Kind Code:
B2
Abstract:
To provide an ion gun controller and ion gun control method, capable of suppressing degradation in exposure dose.SOLUTION: An ion gun controller 70 includes a gas control section 71 and a voltage control section 72. The gas control section 71 repeats the control for compensating for degradation in a detection value by an increase in a gas flow rate value so that a current detection value is a target current value. The ion gun controller 70 increases a gas flow rate at the completion of a constant voltage period against a gas flow rate at the start of the constant voltage period within the constant voltage period.SELECTED DRAWING: Figure 2
Inventors:
Toshinori Hayashi
Harukan Iwai
Masaaki Shinoda
Murata Masaru
Takuya Koyama
Harukan Iwai
Masaaki Shinoda
Murata Masaru
Takuya Koyama
Application Number:
JP2018187162A
Publication Date:
August 29, 2022
Filing Date:
October 02, 2018
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01J37/30; H01J27/08; H01J37/08
Domestic Patent References:
| JP52100286A | ||||
| JP6176725A | ||||
| JP1052366A | ||||
| JP2008034230A | ||||
| JP2011119499A | ||||
| JP2012164677A | ||||
| JP2018049842A |
Foreign References:
| WO2013055523A2 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda
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