Title:
イオン注入システム及び制御方法
Document Type and Number:
Japanese Patent JP2004519070
Kind Code:
A
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Inventors:
Horsesky Thomas N
Cohen brian sea
Clar Wade A
Sacco George P. Junior
Cohen brian sea
Clar Wade A
Sacco George P. Junior
Application Number:
JP2002545772A
Publication Date:
June 24, 2004
Filing Date:
June 12, 2001
Export Citation:
Assignee:
Semquip Inc.
International Classes:
H01J27/20; H01J37/08; H01J37/317; H01L21/265; (IPC1-7): H01J37/317; H01J27/20; H01J37/08; H01L21/265
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda