Title:
ION IMPLANTING APPARATUS
Document Type and Number:
Japanese Patent JPS61267250
Kind Code:
A
Abstract:
PURPOSE: To dispense with a deflection magnet and an angle correction magnet which would cause unsure deflection, by straightly moving a turntable fitted with a plurality of substrates, while rotating the turntable.
CONSTITUTION: Two turntables 25a, 25b are provided in a single vacuum container 31 so that the turntables are rotated by motors 26a, 26b and can be straightly moved in the direction of the top of each turntable as shown by arrows 30a. Substrates 27 are attached with substrate attaching jigs 30 to the turntables 25a, 25b. Demounting sections 32a, 32b for detaching the substrates from the turntables and mounting sections 33a, 33b for attaching them thereto are provided in the vacuum container 31.
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Inventors:
FURUYA MASAYASU
Application Number:
JP10790785A
Publication Date:
November 26, 1986
Filing Date:
May 20, 1985
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
H01J37/317; H01L21/265; (IPC1-7): H01L21/265
Attorney, Agent or Firm:
Iwao Yamaguchi
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