イオン源装置

Japanese Patent JP7237877

B2

To prevent at least deterioration in withstand voltage performance of an insulating member for electrically insulating a first electrode and a second electrode.SOLUTION: An ion source device 10 includes a first vacuum container 11 for accommodating a first electrode 1 to which a high voltage is applied and in which an opening portion 1X is formed, a second vacuum container 12 for accommodating a second electrode 2 in which an opening portion 2X is formed, and an insulating tube 13 which is arranged between the first electrode or the first vacuum container and the second electrode or the second vacuum container, and formed of an insulating material. The ion source device 10 extracts an ion beam through the respective opening portions of the first electrode and the second electrode. A protective member 14 that covers the insulating tube from the inside thereof is arranged between the first electrode, the second electrode and the insulating tube, and this protective member is configured to be movable with respect to the first electrode by a movable mechanism 15.SELECTED DRAWING: Figure 1

Takayuki Sako
Kazuya Ohsaki
Shigeki Takayama
Shinya Matsuda
Spadavecchija Ulderico Claudio Antonio

JP2020043867A

March 13, 2023

March 13, 2020

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Toshiba Corporation
Toshiba Energy Systems Co., Ltd.

H01J27/02; H01J27/18; H01J37/08; H05H1/46; H05H3/06; H05H7/08

JP6231712A
JP2018161449A
JP2001504977A
JP2008077857A
JP2010062056A
JP2010251708A
JP2015065010A
JP2015109150A
JP2016100056A

US5969470

Patent Attorney Tokyo International Patent Office

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