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Patent Searching and Data


Title:
ION SOURCE DEVICE
Document Type and Number:
Japanese Patent JPS5960847
Kind Code:
A
Abstract:

PURPOSE: To heat the thermal cathode and an auxiliary electrode while using only a DC power supply for maintaining the required temperatures thereof, by preparing a metal shell having many uniformly made holes or a metal reticular thermal emitter between the thermal cathode and the auxiliary electrode.

CONSTITUTION: A thermal emitter 7 having many uniformly made holes is prepared between a thermal cathode 5 and an auxiliary electrode 6. When a tungsten filament 8 is preheated and a DC heating power supply 11 is connected to the filament as shown by a dotted line, the auxilliary electrode 6 is heated by the electrons emitted from the tungsten filament 8. When the temperature of the auxiliary electrode 6 reaches the prescribed value, the DC heating power supply 11 is changed over as shown by a real line. Then, the heat emitter 7 and the thermal cathode 5 are heated by the electrons emitted from the auxiliary electrode 6 so that the auxiliary electrode 6 is maintained at the required temperature in turn due to said radiant heat. In this way, sufficient amount of electrons are supplied into the main discharge room 4 in order to perform arc discharge by using a discharge power supply 12 while heating the thermal cathode 5 and maintaining its temperature.


Inventors:
ITOU YASUYUKI
SUGAWARA TOORU
Application Number:
JP16854082A
Publication Date:
April 06, 1984
Filing Date:
September 29, 1982
Export Citation:
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Assignee:
TOSHIBA KK
International Classes:
H01J37/08; H01J3/04; H01J27/02; H01J27/10; (IPC1-7): H01J3/04; H01J27/10; H01J37/08
Attorney, Agent or Firm:
Noriyuki Noriyuki