イオン源及びイオン注入機 - Nissin Ion Equipment Co., Ltd.

Title:

イオン源及びイオン注入機

Document Type and Number:

Japanese Patent JP7093506

Kind Code:

B2

Abstract:

An ion source is provided that includes a gas source for supplying a gas, and an ionization chamber defining a longitudinal axis extending therethrough and including an exit aperture along a side wall of the ionization chamber. The ion source also includes one or more extraction electrodes at the exit aperture of the ionization chamber for extracting ions from the ionization chamber in the form of an ion beam. At least one of the extraction electrodes comprises a set of discrete rods forming a plurality of slits in the at least one extraction electrode for enabling at least one of increasing a current of the ion beam or controlling an angle of extraction of the ion beam from the ionization chamber. Each rod in the set of discrete rods is parallel to the longitudinal axis of the ionization chamber.

Inventors:

Haft Samike
Sacco George

Application Number:

JP2019504018A

Publication Date:

June 30, 2022

Filing Date:

October 27, 2017

Export Citation:

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