Title:
ION SOURCE
Document Type and Number:
Japanese Patent JP2022167278
Kind Code:
A
Abstract:
To provide an ion source that is simple in configuration and relatively inexpensive in terms of material cost even when enlarged.SOLUTION: An ion source IS2 has a plasma container 1, a plurality of flat plate electrodes 2-4 arranged in the direction from which an ion beam is drawn from the plasma container 1, and a cylindrical member 6 downstream of a suppression electrode 4. The flat plate electrodes 2-4 include the suppression electrode 4 to which a negative voltage is applied to drive back electrons to the most downstream side in the ion beam drawing direction.SELECTED DRAWING: Figure 1
Inventors:
INAI YUTAKA
DOI SHOJIRO
DOI SHOJIRO
Application Number:
JP2021072980A
Publication Date:
November 04, 2022
Filing Date:
April 23, 2021
Export Citation:
Assignee:
NISSIN ION EQUIPMENT CO LTD
International Classes:
H01J37/08; H01J27/16