Title:
ION SOURCE
Document Type and Number:
Japanese Patent JP2023008611
Kind Code:
A
Abstract:
To obtain an ion source which can be repaired by a short-term replacement work even when discharge traces are formed on the surface of a cathode electrode.SOLUTION: In an ion source that generates plasma and extracts an ion beam, a cathode electrode surface conditioning mechanism for protecting the outer surface of a cathode electrode is arranged on the cathode electrode that leads to a device that utilizes the ion beam.SELECTED DRAWING: Figure 1
Inventors:
OSAKI KAZUYA
MATSUDA SHINYA
TAKAYAMA SHIGEKI
SAKO TAKAYUKI
MATSUDA SHINYA
TAKAYAMA SHIGEKI
SAKO TAKAYUKI
Application Number:
JP2021112301A
Publication Date:
January 19, 2023
Filing Date:
July 06, 2021
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA ENERGY SYSTEM & SOLUTION CORP
TOSHIBA ENERGY SYSTEM & SOLUTION CORP
International Classes:
H01J27/02; H01J37/08; H05H1/24
Attorney, Agent or Firm:
Takumi Hara
寺脇 秀▲徳▼
Yuzuru Kurihara
寺脇 秀▲徳▼
Yuzuru Kurihara
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