Title:
IRRADIATION APPARATUS
Document Type and Number:
Japanese Patent JP3358090
Kind Code:
B2
Abstract:
PURPOSE: To remove a beam of background light having a narrow-band spectrum and to radiate a laser beam whose spectral is narrower by a method wherein only a fundamental light flux is extracted spatially out of the fundamental light flux and a noise component and an extraction means is adjusted according to the spatial position of the noise component with respect to the fundamental light flux.
CONSTITUTION: A laser beam whose band has been made narrow is emitted from an excimer laser 1 together with a beam of background light whose band has not been made narrow. A slit 24 limits the beam of background light; only a spectrum whose band has been made narrow is passed through an opening part in the slit 24. The opening part has a structure wherein its width both in the longitudinal direction and the transverse direction can be changed freely by using a drive part 23. One part of the laser beam which has been passed through the slit 24 is reflected by using a beam splitter 22; it is incident on a detector 3. A beam reference is always compared with a detection result; the width of the slit 24 is controlled by using the drive part 23. Thereby, it is possible to obtain the spectrum which does not contain any beam of background light and which has been made narrow.
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Inventors:
Akira Miyaji
Atsumi Shinobu
Atsumi Shinobu
Application Number:
JP2160592A
Publication Date:
December 16, 2002
Filing Date:
January 13, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
F21S2/00; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP3250776A | ||||
| JP354816A | ||||
| JP1287427A | ||||
| JP2260412A | ||||
| JP2244708A | ||||
| JP63269518A |