To provide an effect advantageous for reducing the intensity difference of a plurality of charged particle beams in an irradiation system.
An irradiation system for irradiating an object with a plurality of charged particle beams includes an emission unit for emitting a charged particle beam radially with a first axis as a central axis, and a lens array including a plurality of lens and dividing a charged particle beam emitted from the emission unit into a plurality of charged particle beams corresponding to the plurality of lens, respectively. The plurality of lens are arranged so that the crossover of an emission unit on the main axis of a charged particle beam passing through each lens and the distance to a lens corresponding to the crossover are constant over the plurality of lens.
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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