JIG, ATTACHMENT METHOD, AND REMOVAL METHOD

Japanese Patent JP2023094699

A

To alleviate an impact on a mount when attaching a processing tool to the mount.SOLUTION: In a processing device includes: a chuck table which has a holding surface that holds a workpiece; a spindle which is arranged above the holding surface and in which a mount attached with a processing tool is fixed to the tip thereof; and a pedestal part which is arranged around the chuck table, a jig which can be used when attaching the processing tool to the mount comprises: a first support part which can support the processing tool; a second support part which is located below the first support part and is supported by the pedestal part; and a body part which is arranged between the first support part and the second support part. The body part comprises: a balloon part which expands by injection of gas and shrinks by discharge of the gas; an injection port for injecting the gas to the balloon part; and a discharge port for discharging the gas from the balloon part. By expanding the balloon part in such a state that the processing tool is supported by the first support part, the jig moves the processing tool so as to get close to the mount.SELECTED DRAWING: Figure 3

JP2024034297	Balance adjustment method and grinding wheel
JP3444542	LENS GRINDING DEVICE

MATSUZAWA MINORU

JP2021210151A

July 06, 2023

December 24, 2021

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DISCO ABRASIVE SYSTEMS LTD

B24B45/00; B23Q3/12; B24B7/04; H01L21/304

Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato

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