Title:
反射型フォトマスクの塵付着防止用治具、その取付け方法、その取付け装置、及び反射型フォトマスクの保管装置
Document Type and Number:
Japanese Patent JP5790096
Kind Code:
B2
Inventors:
Noriaki Takagi
Application Number:
JP2011082818A
Publication Date:
October 07, 2015
Filing Date:
April 04, 2011
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G03F1/66; G03F1/24
Domestic Patent References:
| JP9068793A | ||||
| JP2001028334A | ||||
| JP2003257852A | ||||
| JP2007012942A | ||||
| JP2008087811A |
Foreign References:
| WO2011125407A1 |
Attorney, Agent or Firm:
Kurata Masatoshi
Takakura Shigeo
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takakura Shigeo
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori