JOINT PART SURVEY INSTRUMENT

Japanese Patent JPH01156661

A

PURPOSE:To execute the inspection irrespective of a shape of the surface of a sample by providing an echo counter for measuring a distance between an ultrasonic radiation surface and the sample from a transmission timing of an ultrasonic wave and a reception timing of an echo from the surface of the sample. CONSTITUTION:By a transmission timing determined by a transmission timing signal generator 7, an ultrasonic wave is radiated to a sample 2 from an array transducer 3. The ultrasonic wave reflected by the surface of the sample 2 is received by the array transducer 3, and a received surface echo is inputted as an electric signal to a receiver 6. By a surface echo counter 10, a distance between the array transducer 3 and the sample 2 is derived from a time difference between the transmission timing and a reception timing of the surface echo, the correction quantity of a delay time to transmitting and receiving signals of each vibration element of the array transducer 3 is calculated again newly, and it becomes a control data of the next transmitting and receiving cycles. By repeating the foregoing, an ultrasonic beam can be controlled so as to be focused to a survey object part irrespective of a shape of the surface of the sample.

KUBOTA JUN
KINO HIROTOSHI
TAKESUTE YOSHINORI
OKADA HISAO

JP31688287A

June 20, 1989

December 15, 1987

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HITACHI LTD

G01N29/04; G01N29/28; G01S7/52; G10K11/34; (IPC1-7): G01N29/04

JPS5687855A	1981-07-16
JPS61160053A	1986-07-19
JPS601554A	1985-01-07
JPS61198056A	1986-09-02
JPS62144066A	1987-06-27
JPS56164953A	1981-12-18

Tatsuyuki Unuma (1 outside)

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