Title:
JOSEPHSON EFFECT ELEMENT
Document Type and Number:
Japanese Patent JPS6437886
Kind Code:
A
Abstract:
PURPOSE:To facilitate three-dimensional arrangement, and to enable large integration by forming a Josephson effect element to a vertical type. CONSTITUTION:A high-temperature superconductive film 3 (13) is wired and shaped onto an insulating substrate 1 (11) while a pore bored to an insulating film 2(12) is used as a vertical type micro-bridge section 4 (14). Gate electrodes 15 are formed onto the side surfaces of the micro-bridge section 14 (4).
Inventors:
IWAMATSU SEIICHI
Application Number:
JP19465087A
Publication Date:
February 08, 1989
Filing Date:
August 04, 1987
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L39/22; (IPC1-7): H01L39/22
Attorney, Agent or Firm:
Kisaburo Suzuki (2 outside)