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Title:
JUNCTION TYPE FIELD EFFECT TRANSISTOR
Document Type and Number:
Japanese Patent JPH06132308
Kind Code:
A
Abstract:

PURPOSE: To form the FET capable of rapidly operating at low cost collectively and evenly in wide space.

CONSTITUTION: The Junction type field effect transistor is provided with a substrate 1 having a crystal formation starting point comprising non-single crystalloid, a III-V group compound single crystal having a p type semiconductor region 104 formed on a substrate 101 using the starting point as a nucleus by crystalline formation process as wall as an n type semiconductor region 105 on the p type semiconductor region 104 or an insular semiconductor crystal as a III-V group semiconductor polycrystalline in the mean particle diameter exceeding 0.2μm. Furthermore, the FET is provided with source, drain electrodes 107 having ohmic junction formed on the n type semiconductor region 105 as well as a gate electrode 108 having Schottky junction formed on the n type semiconductor region 105.


Inventors:
KAWASAKI HIDEJI
TOKUNAGA HIROYUKI
Application Number:
JP30056192A
Publication Date:
May 13, 1994
Filing Date:
October 14, 1992
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/20; H01L21/205; H01L21/337; H01L21/338; H01L29/808; H01L29/812; (IPC1-7): H01L21/337; H01L21/20; H01L29/808
Attorney, Agent or Firm:
Yamashita