LAMINATE, ELECTRON SOURCE INCLUDING LAMINATE, ELECTRONIC DEVICE, METHOD OF MANUFACTURING LAMINATE, AND PURIFICATION METHOD

Title:

LAMINATE, ELECTRON SOURCE INCLUDING LAMINATE, ELECTRONIC DEVICE, METHOD OF MANUFACTURING LAMINATE, AND PURIFICATION METHOD

Document Type and Number:

Japanese Patent JP2023045834

Kind Code:

A

Abstract:

To provide a novel low-work function material which has low chemical reactivity to lanthanoid-based boride known as a low-work function material, especially, a low-work function material which can have its surface purified at a lower heating temperature than before after being exposed to atmospheric gas.SOLUTION: The present invention relates to a laminate which has its surface coated with a thin film and includes a lanthanoid-based boride film formed on a substrate, the thin film being a hexagonal boron nitride thin film of a monoatomic layer.SELECTED DRAWING: None

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Inventors:

NAGAOKA KATSUMI
AIZAWA TAKASHI
OMI SHUNICHIRO

Application Number:

JP2021154427A

Publication Date:

April 03, 2023

Filing Date:

September 22, 2021

Export Citation:

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Assignee:

NAT INST MATERIALS SCIENCE
TOKYO INST TECH

International Classes:

C23C14/06; B32B18/00; B82Y30/00; B82Y40/00; C23C14/58; H01J9/04; H01J37/06

Attorney, Agent or Firm:

Patent Attorney Corporation Asamura Patent Office

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