積層体とその製造方法 - National Institute of Advanced Industrial Science and Technology

Title:

積層体とその製造方法

Document Type and Number:

Japanese Patent JP7245550

Kind Code:

B2

Abstract:

To provide a laminate having little unevenness on a surface and having a dense film.SOLUTION: The laminate 100 of the present invention includes a substrate 101, a first layer 102 made of a ceramic material, and a second layer 103 made of a non-crystalline or microcrystalline material. The first layer is formed on one main surface 101a of the substrate and has a concave 102A as a non-flat portion on the opposite side to the substrate 101. The second layer is formed on the first layer 102 so that at least the concave 102A is filled.SELECTED DRAWING: Figure 1

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Inventors:

Takaaki Manabe
Jun Akito
Bordeaux Gabriel
Soma Mitsugu
Rintaro Aoyagi
Hiroaki Noda

Application Number:

JP2021117406A

Publication Date:

March 24, 2023

Filing Date:

July 15, 2021

Export Citation:

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Assignee:

National Institute of Advanced Industrial Science and Technology

International Classes:

B32B18/00; B32B9/00; C23C28/04

Domestic Patent References:

JP2011195857A
JP2007320797A
JP2012184841A
JP2007266303A
JP2005158933A

Attorney, Agent or Firm:

Kazuzumi Nishizawa
Makiko Otsuki
Kazunori Onami

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