Title:
積層体、半導体装置、ミストＣＶＤ装置及び成膜方法
Document Type and Number:
Japanese Patent JP7220257
Kind Code:
B2
Abstract:
The present invention is a laminate including: a crystal substrate; a middle layer formed on a main surface of the crystal substrate, the middle layer containing a mixture of an amorphous region in an amorphous phase and a crystal region in a crystal phase having a corundum structure mainly made of a first metal oxide; and a crystal layer formed on the middle layer and having a corundum structure mainly made of a second metal oxide. Thus, provided is a laminate having high-quality corundum-structured crystal with sufficiently suppressed crystal defects.
Inventors:
Hiroshi Hashigami
Application Number:
JP2021110457A
Publication Date:
February 09, 2023
Filing Date:
July 02, 2021
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
H01L21/365; C23C16/40; C23C16/448; C30B25/14; C30B29/16; H01L21/368
Domestic Patent References:
| JP2017054654A | ||||
| JP2004296598A | ||||
| JP2016025256A | ||||
| JP2000188260A | ||||
| JP2012119706A | ||||
| JP2006060066A | ||||
| JP2001038831A | ||||
| JP2010003975A |
Foreign References:
| WO2015005202A1 |
Attorney, Agent or Firm:
Mikio Yoshimiya
Toshihiro Kobayashi
Toru Otsuka
Toshihiro Kobayashi
Toru Otsuka