Title:
LAMINATED BLOCK AND ITS MANUFACTURING METHOD, ELECTROMAGNETIC ACTUATOR, STAGE UNIT USING THE SAME, EXPOSURE SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2002260916
Kind Code:
A
Abstract:
To enable a protective film to be formed on the surface of a core (laminated block) used for an electromagnetic actuator or the like without deteriorating the shape of the core in accuracy.
Many magnetic thin sheets 21 and 31 whose surfaces are covered with an insulating film 24 are laminated and bonded together with adhesive 25 for the formation of laminated blocks 22 and 32. The laminated blocks 22 and 32 are subjected to electroless nickel plating, so that a nickel film 26 is formed at least on laminate surfaces 22A and 32A. The nickel film 26 is 5 to 20 μm in thickness. The laminated blocks 22 and 32 are used as an I core 20 and an E core for an electromagnetic actuator 100.
Inventors:
KIKUCHI TOSHIHIDE
Application Number:
JP2001060214A
Publication Date:
September 13, 2002
Filing Date:
March 05, 2001
Export Citation:
Assignee:
NIKON CORP
International Classes:
B23Q5/28; G03F7/20; H01F7/06; H01F27/24; H01L21/027; H02K33/00; (IPC1-7): H01F7/06; B23Q5/28; H01F27/24; H01L21/027
Attorney, Agent or Firm:
Furuya
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