Title:
積層体形成装置、積層体形成方法及びガラス基板の製造方法
Document Type and Number:
Japanese Patent JP5226583
Kind Code:
B2
Inventors:
Fumihiko Shigeta
Application Number:
JP2009083936A
Publication Date:
July 03, 2013
Filing Date:
March 31, 2009
Export Citation:
Assignee:
HOYA CORPORATION
Hoya Glass Disc Philippines Incorporated
Hoya Glass Disc Philippines Incorporated
International Classes:
G11B5/84; B24B5/12; B24B9/00; B65G57/04; G11B5/73
Domestic Patent References:
| JP2001162510A | ||||
| JP2007280451A | ||||
| JP2003203899A |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda