To provide a highly reliable stacked piezo-electric element which is capable of making interface strength between an electrode and a ceramic strong and preventing delamination and which is excellent in endurance.
The particle diameter of a piezoelectric ceramic which touches an internal electrode is longer than the other portion in a stacked piezo-electric element structured by stacking a piezoelectric substance and an electrode alternately. The shortest particle diameter of the ceramic which touches the internal electrode is longer than the shortest particle diameter of the other portion in the stacked piezo-electric element. The particle diameter of the piezoelectric ceramic which touches the internal electrode ranges from 0.5 micron to 5 micron.
COPYRIGHT: (C)2005,JPO&NCIPI
Katsuyuki Sakagami
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