Title:
積層薄膜および電子デバイス
Document Type and Number:
Japanese Patent JP7415425
Kind Code:
B2
Abstract:
To provide a stacked thin film having both excellent piezoelectric properties and excellent magnetostrictive properties and an electronic device with high conversion efficiency.SOLUTION: A stacked thin film 2 having a piezoelectric thin film 10 composed of epitaxially grown films and a ferromagnetic thin film 20 formed on the piezoelectric thin film 10, and an electronic device are provided. The ferromagnetic thin film 20 includes one or more crystalline phases 24 and one or more amorphous phases 22.SELECTED DRAWING: Figure 1
Inventors:
Takao Noguchi
Yasuhisa Okano
Yasuhisa Okano
Application Number:
JP2019189507A
Publication Date:
January 17, 2024
Filing Date:
October 16, 2019
Export Citation:
Assignee:
SAE Magnetics(H.K.)Ltd.
International Classes:
H10N35/85; H04R23/02; H10N30/076; H10N30/077; H10N30/853
Domestic Patent References:
| JP2018026980A | ||||
| JP3283476A |
Foreign References:
| WO2014157526A1 | ||||
| WO2010110423A1 |
Attorney, Agent or Firm:
Maeda Suzuki International Patent Attorneys Corporation