Title:
LAMP DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING ARTICLE
Document Type and Number:
Japanese Patent JP2018098044
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an advantageous technique for improving safety and workability when replacing the lamp.SOLUTION: Disclosed is a lamp device retained by a holding part having an outlet for blowing out gas and a male screw. The lamp device includes: a glass tube covering a discharge space in which a pair of electrodes is arranged opposite to each other; a mouthpiece which extends from the glass tube and is connected to one of the pair of electrodes; and a fastening part which is fastened to the holding part by being screwed to the male screw of the holding part. The fastening part has a passage communicating with the outlet when fastened to the holding part, and gas sprayed from the outlet is introduced into either one or both of the glass tube and the mouthpiece.SELECTED DRAWING: Figure 2
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Inventors:
YOKOTA YUKIHIRO
MATSUMOTO HIDEKI
MATSUMOTO HIDEKI
Application Number:
JP2016241595A
Publication Date:
June 21, 2018
Filing Date:
December 13, 2016
Export Citation:
Assignee:
CANON KK
International Classes:
H01J5/50; G03F7/20; H01J7/24; H01J61/52
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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