Title:
LAMP, LIGHT SOURCE DEVICE, EXPOSURE DEVICE, AND ARTICLE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2019204748
Kind Code:
A
Abstract:
To provide an advantageous technique for efficiently cooling a metal foil of a lamp.SOLUTION: A lamp includes an arc tube having a discharge portion and a sealing portion, an electrode having a first end disposed in a discharge space inside the discharge portion and a second end disposed in the sealing portion, a base connected to the sealing portion, and a metal foil that electrically connects the second end and the base. The discharge space and the inner space inside the base are separated from each other by a sealing material disposed in the sealing portion. The base includes a communication hole that communicates the outer space outside the base with the inner space, and gas supplied from the outer space to the inner space through the communication hole touches the metal foil, such that the metal foil is cooled.SELECTED DRAWING: Figure 3
Inventors:
YOKOTA YUKIHIRO
MATSUMOTO HIDEKI
SUGIYAMA YASUSHI
MATSUMOTO HIDEKI
SUGIYAMA YASUSHI
Application Number:
JP2018100862A
Publication Date:
November 28, 2019
Filing Date:
May 25, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; H01J5/50; H01J61/36
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu