Title:
LASER BEAM MACHINING APPARATUS
Document Type and Number:
Japanese Patent JP2005254281
Kind Code:
A
Abstract:
To reduce manufacturing time of a three-dimensional structure and to obtain a laser beam machining apparatus capable of enhancing its manufacturing accuracy.
The laser beam machining apparatus is provided with a space light modulator 4 that modulates an optical pulse emitted from a pulse light source 1 in accordance with a spatial pattern changed under instructions by a controller 3. The optical pulse modulated by the space light modulator 4 is once Fourier-transformed and then inversely Fourier-transformed, so that the optical pulse after the inverse Fourier transformation is converged on a specimen 8 movable in the optical axis direction.
Inventors:
AKIYAMA KOICHI
NISHIKAWA TOMOSHI
NISHIMURA TETSUYA
GOTODA MITSUNOBU
TOKUDA YASUKI
NISHIKAWA TOMOSHI
NISHIMURA TETSUYA
GOTODA MITSUNOBU
TOKUDA YASUKI
Application Number:
JP2004069276A
Publication Date:
September 22, 2005
Filing Date:
March 11, 2004
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G02F1/061; B23K26/06; B23K26/073; B23K26/10; (IPC1-7): B23K26/06; B23K26/10; G02F1/061
Attorney, Agent or Firm:
Hiroaki Tazawa
Konobu Kato
Hideaki Tazawa
Hamada Hatsune
Konobu Kato
Hideaki Tazawa
Hamada Hatsune