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Title:
Laser beam machining device
Document Type and Number:
Japanese Patent JP6037390
Kind Code:
B2
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Inventors:
Kise Taizo
Hiroshi Nomura
Application Number:
JP2013111731A
Publication Date:
December 07, 2016
Filing Date:
May 28, 2013
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
B23K26/00; B23K26/04; H01L21/301
Domestic Patent References:
JP2004141979A
JP2006246581A
JP201052014A
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office
Kyoko Kawamura
Isao Sasaki
Ken Kubo



 
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