Title:
Laser beam machining device
Document Type and Number:
Japanese Patent JP6037925
Kind Code:
B2
Inventors:
Kentaro Iizuka
Application Number:
JP2013083823A
Publication Date:
December 07, 2016
Filing Date:
April 12, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23K26/04; B23K26/00; B23K26/53; H01L21/301
Domestic Patent References:
| JP201052014A | ||||
| JP2009202190A | ||||
| JP2009200383A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi