Title:
Laser beam machining process
Document Type and Number:
Japanese Patent JP6218646
Kind Code:
B2
Inventors:
Kimura Saki
Ryugo Ohba
Ryugo Ohba
Application Number:
JP2014044268A
Publication Date:
October 25, 2017
Filing Date:
March 06, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23K26/364; B23K26/00; H01L21/301
Domestic Patent References:
| JP2009504432A | ||||
| JP2003224087A | ||||
| JP2010264471A |
Foreign References:
| US20100247836 | ||||
| US20140352358 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto
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