Title:
レーザ装置及び極端紫外光生成システム
Document Type and Number:
Japanese Patent JP6928600
Kind Code:
B2
Abstract:
The laser apparatus includes a master oscillator, an amplifier, a power source, and a controller to control the power source. The controller controls the power source such that an excitation intensity of the amplifier in a burst oscillation period performing the burst oscillation is a first excitation intensity, controls the power source such that, if the predetermined repetition frequency is a first repetition frequency, an excitation intensity of the amplifier in a suspension period suspending the burst oscillation is a second excitation intensity equal to or lower than the first excitation intensity, and controls the power source such that, if the predetermined repetition frequency is a second repetition frequency higher than the first repetition frequency, the excitation intensity of the amplifier in the suspension period is a third excitation intensity lower than the second excitation intensity.
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Inventors:
Yoshiaki Kurosawa
Application Number:
JP2018502951A
Publication Date:
September 01, 2021
Filing Date:
March 02, 2016
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
H01S3/10; H01S3/134; H01S3/23
Domestic Patent References:
| JP2012191171A | ||||
| JP2012248615A | ||||
| JP2012216768A | ||||
| JP2043782A | ||||
| JP2013258643A | ||||
| JP2012248614A | ||||
| JP2012186433A | ||||
| JP2010171131A | ||||
| JP2000340872A | ||||
| JP2000306820A | ||||
| JP5167162A |
Foreign References:
| US20150263481 | ||||
| US5812569 |
Attorney, Agent or Firm:
Hosaka Enju