Title:
LASER EXCITATION FORM HIGH CURRENT DENSITY TYPE ELECTRON BEAM GENERATOR
Document Type and Number:
Japanese Patent JPH03176953
Kind Code:
A
Abstract:
PURPOSE: To generate an electron beam having high electric current density by covering a front face of a transparent substrate with a semitransparent film, and exaporating a photoelectron emitting material on it. CONSTITUTION: A light beam emitted from a laser 10 is controlled on its beam intensity by a modulator 11, and is deflected, and is introduced by an optical vertical train 12, and a focus is adjusted on a photoelectron emitting cathode 16 through lens 15. The cathode has a photoelectron emitting surface formed of, for example, Cs3 Sb to emit an electron when irradiated with a laser beam. A transparent substrate 40 to pass the light is arranged in the cathode 16, and a metallic coating layer 42 is deposited on one surface of the substrate 40 except for a central area 44. Next, a translucent conductive layer 46 is deposited on the layer 42 and the area 44, and lastely, a layer 48 of a photoelectron emitting material is generated in the area 44. By this constitution, a strong laser beam can be applied from a back face of the substrate 40, and high density photoelectron gas can be generated in the forward direction of the substrate 40.
Inventors:
PIITAA II UTSUTEINGAA
CHIYANSHIN RII
CHIYANSHIN RII
Application Number:
JP13731790A
Publication Date:
July 31, 1991
Filing Date:
May 29, 1990
Export Citation:
Assignee:
THERMO ELECTRON CORP
International Classes:
H01J37/075; H01J1/34; H01J9/12; H01J37/073; H01J37/317; H01L21/027; H01S3/00; (IPC1-7): H01J37/073; H01L21/027; H01S3/00
Domestic Patent References:
| JPS5469953A | 1979-06-05 | |||
| JPS54146952A | 1979-11-16 |
Attorney, Agent or Firm:
Wakabayashi Tadashi