Title:
LASER LIGHT MONITORING DEVICE
Document Type and Number:
Japanese Patent JPH07139998
Kind Code:
A
Abstract:
PURPOSE: To exactly perform measurement of a part of the foot of power density distribution corresponding to a cut threshold value.
CONSTITUTION: A measurement means 11 is provided with a laser light reflection plate 12, a power meter 13, a damper 14 and an operation device 15. The laser light 16 passes through a plurality of circular openings 12a or 12f different in diameter successively, is received by the power meter 13 and its outputs are measured. The power densities of lower power density parts are measured on the basis of the difference between the measurement results at the power meter 13 at the time when it passes through each circular opening 12a or 12f.
Inventors:
SHINONAGA HIDEYUKI
Application Number:
JP28641193A
Publication Date:
June 02, 1995
Filing Date:
November 16, 1993
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01J1/02; G01J1/42; (IPC1-7): G01J1/02; G01J1/42
Attorney, Agent or Firm:
Tsuyoshi Sato (1 person outside)