Title:
LASER LIGHT SOURCE AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2009038383
Kind Code:
A
Abstract:
To achieve stable exposure control in an exposure apparatus having a plurality of oscillation modes which can be selectively switched.
A laser light source has the plurality of oscillation modes which can be selectively switched, oscillates laser beam on an oscillation condition corresponding to each oscillation mode and includes an oscillator for oscillating laser beam and a control means which has control data for controlling the oscillation of laser beam for each oscillation mode and controls the oscillation of laser beam from the oscillator on the basis of control data corresponding to a selected oscillation mode out of the plurality of oscillation modes.
Inventors:
NISHINAGA HISASHI
Application Number:
JP2008229902A
Publication Date:
February 19, 2009
Filing Date:
September 08, 2008
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G03F7/20; H01S3/10; H01S3/225
Domestic Patent References:
| JPH10125990A | 1998-05-15 | |||
| JPH0645230A | 1994-02-18 | |||
| JPH04252013A | 1992-09-08 |
Attorney, Agent or Firm:
Hitoshi Maeda
Toru Suzuki
Horie
Toru Suzuki
Horie
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