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Title:
LASER MACHINING METHOD AND FINE PARTICLE LAYER FORMER
Document Type and Number:
Japanese Patent JP2014124646
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser machining method for reducing such a risk that debris generated by ablation machining is deposited on a workpiece, and for improving machining efficiency in comparison with before.SOLUTION: A laser machining method includes the steps of: coating a back side 1b that is a laser beam irradiation surface of a workpiece 1 by particles having absorbability to a wavelength of the laser beam L for irradiating the workpiece 1, and forming a fine particle layer 30 on the back side 1b (fine particle layer forming step); and irradiating the workpiece 1 with the laser beam L through the fine particle layer after this and subjecting the workpiece 1 to ablation machining (machining step). The laser beam L is absorbed at the fine particle layer 30A, so that the diffusion and reflection of energy is prevented, thereby enabling the ablation machining to the workpiece 1.

Inventors:
OURA SACHINOBU
SHIMOFUSA DAIGO
KITAHARA NOBUYASU
HARADA SEIJI
Application Number:
JP2012281357A
Publication Date:
July 07, 2014
Filing Date:
December 25, 2012
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23K26/36; B23K26/18; B28D5/00; H01L21/301
Domestic Patent References:
JP2005150523A2005-06-09
JP2005353935A2005-12-22
JP2006140311A2006-06-01
JP2012244128A2012-12-10
JP2011167603A2011-09-01
JP2004105886A2004-04-08
JP2012248537A2012-12-13
JP2013081959A2013-05-09
JP2013081962A2013-05-09
JP2012240082A2012-12-10
JPH01191738A1989-08-01
JP2010207723A2010-09-24
JPH05237686A1993-09-17
JP2005186109A2005-07-14
JP2003147155A2003-05-21
JP2006048039A2006-02-16
JP2006022327A2006-01-26
Foreign References:
US5801356A1998-09-01
Attorney, Agent or Firm:
Suenari Mikio



 
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