Title:
LASER MEASURING METHOD USING KNIFE-EDGE METHOD
Document Type and Number:
Japanese Patent JPH10141924
Kind Code:
A
Abstract:
To measure the surface of a die, etc., containing a part having such a surface shape that is difficult to be measured by an auto-focus method.
In an auto-focus measuring method in which the surface shape of an object to be measured is measured by irradiating the object with laser light and detecting an auto-focusing position, the part to be measured of the object is covered with fine power of a ceramic, etc., before measurement. At the time of measuring the surface shape of the part to be measured, the fine power of the ceramic, etc., is mixed in volatile oil and the surface to be measure is covered with the mixture by sprayed the mixture upon the surface with an air gun 12.
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Inventors:
KAKINO YOSHIAKI
MATSUBARA ATSUSHI
YAMAJI IWAO
KAWAI TOMOHIKO
MATSUBARA ATSUSHI
YAMAJI IWAO
KAWAI TOMOHIKO
Application Number:
JP29356896A
Publication Date:
May 29, 1998
Filing Date:
November 06, 1996
Export Citation:
Assignee:
KAKINO YOSHIAKI
YAMAJI IWAO
YASUDA IND
NIPPON DEJITETSUKU KK
GRAPHIC PROD KK
YAMAJI IWAO
YASUDA IND
NIPPON DEJITETSUKU KK
GRAPHIC PROD KK
International Classes:
G01B11/24; G01B11/30; G02B7/28; G03B13/36; (IPC1-7): G01B11/24; G01B11/30; G02B7/28; G03B13/36
Attorney, Agent or Firm:
Takao Watanuki (1 outside)