PURPOSE: To prevent contamination due to adherence of dusts, fine particles, gas molecules and to increase the life of a resonator mirror by spraying laser medium gas to the surface of the mirror in parallel with the surface of the mirror in a laser oscillator having the mirror, and then sucking the gas to a suction port.
CONSTITUTION: Several sets of opposed diffusers 31 and suction ports 33 are so opened at a mirror holder 30 for fixedly holding a resonator mirror 5 at a predetermined distance from the mirror 5 that a gas stream from the diffuser 31 to the port 33 becomes parallel to the surface of the mirror 5. The diffusers 31 are gathered to one conduit 32, connected to a filter 23, and the ports 33 are gathered to another conduit 32, and connected to a blower 34. Laser medium gas GF containing dusts sucked from the ports 33 through the conduit 32 is fed to a filter 23 through the conduit 32 to remove the dusts, purified gas GFB is diffused from the diffuser 31, and again sucked from the ports 33.
KITAGAWA KOJI
AMADA CO LTD