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Title:
LASER OSCILLATOR
Document Type and Number:
Japanese Patent JPH03240283
Kind Code:
A
Abstract:

PURPOSE: To prevent contamination due to adherence of dusts, fine particles, gas molecules and to increase the life of a resonator mirror by spraying laser medium gas to the surface of the mirror in parallel with the surface of the mirror in a laser oscillator having the mirror, and then sucking the gas to a suction port.

CONSTITUTION: Several sets of opposed diffusers 31 and suction ports 33 are so opened at a mirror holder 30 for fixedly holding a resonator mirror 5 at a predetermined distance from the mirror 5 that a gas stream from the diffuser 31 to the port 33 becomes parallel to the surface of the mirror 5. The diffusers 31 are gathered to one conduit 32, connected to a filter 23, and the ports 33 are gathered to another conduit 32, and connected to a blower 34. Laser medium gas GF containing dusts sucked from the ports 33 through the conduit 32 is fed to a filter 23 through the conduit 32 to remove the dusts, purified gas GFB is diffused from the diffuser 31, and again sucked from the ports 33.


Inventors:
HANAKI YOSHIMARO
KITAGAWA KOJI
Application Number:
JP3794490A
Publication Date:
October 25, 1991
Filing Date:
February 19, 1990
Export Citation:
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Assignee:
OKUMA MACHINERY WORKS LTD
AMADA CO LTD
International Classes:
H01S3/034; H01S3/036; H01S3/08; (IPC1-7): H01S3/034; H01S3/036; H01S3/08
Attorney, Agent or Firm:
Azusa Yuzo



 
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