Title:
LASER PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023085733
Kind Code:
A
Abstract:
To provide a laser processing device in which a reticle can be easily installed.SOLUTION: A laser processing device 1 comprises: a stage 2 which supports an object 20; a light source 31 which outputs laser light L; a laser light condensing lens 33 which condenses the laser light L on the object 20; a first reticle R2 which has a first pattern PA; an illumination light source R1 which irradiates the first reticle R2 with illumination light Li; a first projection optical system which projects the first pattern PA on the object 20 by forming a projection image of the first reticle R2 on the object 20 with the illumination light Li passing through the first reticle R2; and a camera 35 which acquires a first pattern image Im1 by capturing an image of the first pattern PA projected to the object 20. The first pattern PA has such a shape that does not have the dependence on the rotation angle of the first reticle R2 around an optical axis of the illumination light Li.SELECTED DRAWING: Figure 6
Inventors:
SANO IKU
SAKAMOTO TSUYOSHI
YOSHIDA TAKAMASA
HOSHIKAWA MASAHARU
SAKAMOTO TSUYOSHI
YOSHIDA TAKAMASA
HOSHIKAWA MASAHARU
Application Number:
JP2021199931A
Publication Date:
June 21, 2023
Filing Date:
December 09, 2021
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
B23K26/53; B23K26/03; B23K26/046; H01L21/301
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama