To control laser beam irradiation more finely and to correct defects more adequately.

A recipe storing part 123 stores irradiation condition images collating with irradiation conditions corresponding to laminated substances, with respect to each of a plurality of lamination regions on the surface of a glass substrate. An image processor 127 recognizes a range of defects on the surface of an FPD substrate 101 manufactured by various substances being laminated on the glass substrate and, on the basis of the irradiation condition images, divides the range of defects in the irradiation region in accordance with lamination regions to be superposed thereon. A main controller 122, through a laser controller 125 and a space modulation controller 126, controls a laser unit 105 while successively designating one or more space modulation patterns in a two-dimensional space light modulator 106, so that each irradiation region is irradiated with the laser beam under the irradiation conditions collated with the lamination regions to be superposed on the irradiation regions.