LASER SCAN MODULE AND MEMS MIRROR DRIVE CONTROL METHOD

Japanese Patent JP2021182103

A

To reduce a phase variation of mirror operation in an H-axis direction in a laser scan module for driving a two-dimensional MEMS mirror by using one drive signal obtained by superposing a V-axis drive signal and an H-axis drive signal.SOLUTION: A laser scan module includes: an MEMS mirror that reflects laser beams; an H-waveform generation part that has a mirror drive part for supplying a drive signal for rotating the MEMS mirror in two axial directions and outputs a sinusoidal wave of a horizontal drive frequency; a V-waveform generation part that outputs a sawtooth wave of a vertical drive frequency; an H-waveform correction part that outputs a correction sinusoidal waveform obtained by changing a phase of a sinusoidal wave at a cycle of the sawtooth wave; an adder that adds the correction sinusoidal wave and the sawtooth wave and outputs a superposition signal; and a class-D amplifier that inputs the superposition signal, performs PWM conversion, and outputs a superposition drive signal in which an H-axis drive signal and a V-axis drive signal are superposed. The MEMS mirror has a frequency characteristic in which a horizontal direction responds to the H-axis drive signal and a vertical direction responds to the V-axis drive signal by receiving the superposition drive signal.SELECTED DRAWING: Figure 9

NAKAJIMA JUNJI
KOBORI TOMOO
MIZUNO RYUICHIRO
MUTSURO YASUO

JP2020088021A

November 25, 2021

May 20, 2020

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HITACHI LG DATA STORAGE INC

G02B26/08; B81B3/00; G02B26/10; G09G3/02; H04N5/74

Aoritsu patent business corporation

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