Title:
レーザスクライブ方法
Document Type and Number:
Japanese Patent JP5361916
Kind Code:
B2
Inventors:
Keisuke Yawata
Seiji Shimizu
Seiji Shimizu
Application Number:
JP2011022661A
Publication Date:
December 04, 2013
Filing Date:
February 04, 2011
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
H01L21/301; B23K26/00; B23K26/38; B23K26/40; B28D5/00
Domestic Patent References:
| JP2008068319A | ||||
| JP2012050988A | ||||
| JP2008006652A | ||||
| JP2004343008A | ||||
| JP2009166103A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation