PURPOSE: To obtain the subject oxide superconductor excellent in the degree of crystalline orientation and superconductivity by equipping a magnetic-field generator by the side of a vapor deposition unit accommodating a substrate and making the substrate or the magnetic-field generator rotatable.
CONSTITUTION: Excited particles generated from a target 3 are deposited on the upper surface of a substrate 25. The substrate 25 is fed from a feed roll 13 at a prescribed rate, passed through the under part of a vapor deposition unit 1, wound up by a winding roll 14 and simultaneously heated at a prescribed temperature by working an auxiliary heater 5. It is well known that the crystal of an oxide superconductor shows c-axial orientation in the direction of a magnetic flux during the above-mentioned deposition in spite of effect of the magnetic flux perpendicular to the substrate 25. Accordingly, the crystal of the oxide superconductor film shows c-axial orientation in the width direction of the substrate 25 in this case and a-axis or b-axis of the crystal is orientated in the longitudinal direction of the substrate 25. By the above- mentioned way, vaporized particles are deposited on the upper surface of the substrate 25 in order and the oxide superconductor film is formed on the substrate 25, thus obtaining the objective oxide superconductor 35.
SADAKATA NOBUYUKI
ONABE KAZUNORI
