Title:
光学素子構造体と集束ビームとを用いたレーザ利用パターン形成
Document Type and Number:
Japanese Patent JP2013515612
Kind Code:
A
Abstract:
Various embodiments provide for laser patterning using a structured optical element and a focused beam. In some embodiments a structured optical element may be integrally formed on a single substrate. In some embodiments, multiple optical components may be combined in an optical path to provide a desired pattern. In at least one embodiment, a projection mask is utilized to control exposure of an object to a laser output, in combination with the controlled motion of the projection mask, the controlled motion of the object and the controlled motion of the laser beam. In some embodiments, a projection mask is utilized to control exposure of an object, and the projection mask may absorb, scatter, reflect, or attenuate a laser output. In some embodiments, the projection mask may include optical elements that vary the optical power and polarization of the transmitted laser beam over regions of the projection mask. In various embodiments, the laser system may modify material of the object. In various embodiments, the laser system may be used to probe a physical property of an object.
Inventors:
Arai, Alan Wai.
Yoshino Ikuyo
Yoshino Ikuyo
Application Number:
JP2012546052A
Publication Date:
May 09, 2013
Filing Date:
December 16, 2010
Export Citation:
Assignee:
Imra America Inc.
International Classes:
B23K26/00; B23K26/06; B23K26/08; H01S3/00; H01S3/10
Domestic Patent References:
| JP2008180983A | 2008-08-07 | |||
| JP2007532322A | 2007-11-15 | |||
| JP2008105046A | 2008-05-08 | |||
| JP2001102720A | 2001-04-13 | |||
| JP2004290985A | 2004-10-21 | |||
| JP2005211909A | 2005-08-11 | |||
| JP2005262219A | 2005-09-29 | |||
| JPH05183216A | 1993-07-23 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Yuko Hara
Masakazu Ito
Yuko Hara