Title:
坩台
Document Type and Number:
Japanese Patent JP4177491
Kind Code:
B2
Inventors:
Ushigome Rikio
Takahashi
Takahashi
Application Number:
JP28700398A
Publication Date:
November 05, 2008
Filing Date:
October 08, 1998
Export Citation:
Assignee:
Tokyo Ceramic Co., Ltd.
International Classes:
B01L3/04; F27B14/10
Domestic Patent References:
| JP10206026A | ||||
| JP9328354A |
Attorney, Agent or Firm:
Hiroshi Okawa