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Title:
層構造コバルト酸化物系結晶体とその製造方法
Document Type and Number:
Japanese Patent JP4122432
Kind Code:
B2
Abstract:

To provide a cobalt-oxide-based single crystal thin film with a layered structure, which is useful for a magnetometric sensor or a GMR.

This manufacturing method comprises mounting a substrate 13 formed of an oxide-based crystal body with a layered structure expressed by A2BO4such as LaSrAlO4, beneath the undersurface of a substrate holder 12 in a vacuum chamber 11, and mounting a target 14 having a composition of La2-xSrxCoO4(1.52-xSrxCoO4is formed on the substrate 13.

COPYRIGHT: (C)2005,JPO&NCIPI


Inventors:
Matsuno
Kawasaki Masashi
Yoshinori Tokura
Application Number:
JP2003284881A
Publication Date:
July 23, 2008
Filing Date:
August 01, 2003
Export Citation:
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Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
C01G51/00; C23C14/08; C30B29/22; H01F10/16; H01F10/32; H01F41/18; H01F41/26; H01F41/30; H01L43/08; H01L43/10
Domestic Patent References:
JP7073886A
Other References:
Cheng Tiexin, Yang Xiangguang, Wu Yue,Synthesis, characterization and catalytic behavior of La2-xSrxCoO4±λ (x = 0-2) in complete oxidation,Science in China, Series B,1995年,Vol.38, No.9,p.1025-1037



 
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