LEAK DETECTOR AND ION SOURCE FOR LEAK DETECTOR

Japanese Patent JP2023005317

A

To improve insulation durability between electrodes substantially without varying the size nor weight of an ion source.SOLUTION: There is provided a leak detector 100 that guides a gas from an analyte X to an analytic pipe 4 having been evacuated, and uses an ion source 6 provided in the analytic pipe 4 to ionize and detect the gas so as to perform leak inspection on the analyte X, wherein the ion source 6 comprises: a filament 61 which emits thermal electrons for ionizing the gas; an electrode 65 which is electrically connected to the filament 61; a base member 66 that the electrode 65 penetrates and which partitions off an internal space 6S where the filament 61 is arranged from the outside; a first insulation member 67 which is provided in a through hole 66 for electrode formed in the base member 66 to insulate the electrode 65 and base member 66; and a second insulation member 68 which is provided around the electrode 65 and extends toward the internal space 6S rather than a surface facing the internal space 6S of the base member 66.SELECTED DRAWING: Figure 4

UNNO YOSHIO
AZUMA MASAHISA
IGAWA AKIO
TERAMOTO AKIRA
ISHINODA REI

JP2021107137A

January 18, 2023

June 28, 2021

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SHIMADZU IND SYSTEMS CO LTD

H01J27/26; H01J37/02; H01J37/08

Nishimura Ryuhei
Shindai Saito
Yoshinaga Uemura
Kusumoto Takayoshi

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