LEAKAGE DETECTOR AND METHOD THEREOF

Title:

LEAKAGE DETECTOR AND METHOD THEREOF

Document Type and Number:

Japanese Patent JPS59182329

Kind Code:

A

Abstract:

@ The leak detector comprises an annular chamber (11) which leads to a circumferential orifice (14) which in turn leads to an annular duct (21) which is symmetrical about the axis of the detector. Barrier gas is fed to the annular chamber (11), for example from an annular chamber (18) and emerges from the opening (20) to form a substantially laminar flow. Leaks are detected by means of a signal gas within an enclosure at a pressure slightly in excess of ambient, and the signal gas is detected from leaks via a probe (2) which is connected for example to a mass spectrometer. The curtain (1) is stable and enables uneven surfaces to be tracked.

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Inventors:

PIITAA EDOWAADO JIYOOJI MAASHI
FURANSHISU REIMONDO PAIPAA
JIYON FURANSHISU UIRUSON

Application Number:

JP789184A

Publication Date:

October 17, 1984

Filing Date:

January 19, 1984

Export Citation:

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Assignee:

BL TECH LTD

International Classes:

G01M3/04; G01M3/20; (IPC1-7): G01M3/20

Attorney, Agent or Firm:

Yoshio Kawaguchi

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